| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid droplet ejection apparatus for achieving stable supply of a liquid substance to be supplied to a liquid droplet ejection head and improving productivity of a pattern comprising a liquid droplet. SOLUTION: The liquid droplet ejection apparatus is provided in which both a liquid substance tank for supplying a liquid substance F using pressure caused by water head difference and a self-sealing valve 33 for controlling a supply pressure of the liquid substance F to be supplied from the liquid substance tank are mounted together with the ejection head on a SCARA robot to allow them to scan along in a scanning direction J (XY plane direction), and an axial portion 41b of a valve body 41 of the self-sealing valve 33 are inserted through a communicating hole 37a between the valve body-containing chamber 37S and a pressure receiving chamber 39S and making it possible to move the valve body 41 only in a vertical direction, and the self-sealing valve 33 is disposed so that the direction of an acceleration for moving the valve body 41 is perpendicular to the direction of an acceleration of a head unit. COPYRIGHT: (C)2007,JPO&INPIT |
