发明名称 PROBE CLEANING DEVICE FOR PROBER
摘要 PROBLEM TO BE SOLVED: To provide an inexpensive cleaning brush unit which is composed of well-known components so that mass-production can be achieved by a machine. SOLUTION: The cleaning brush unit comprises a plate 84 which is adapted to the size of a moving bases, a brush base 85 mounted on the plate 84, a brush base rubber 88 laid on the brush base 85 and only a necessary number of cleaning brushes 81 arranged thereupon, a clamp base 86 fixing the cleaning brushes 81 by pressing ends, a support plate 87, and a setscrew 89 with a hexagonal hole pressing and fixing the support plate 87. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007165697(A) 申请公布日期 2007.06.28
申请号 JP20050361713 申请日期 2005.12.15
申请人 TOKYO SEIMITSU CO LTD 发明人 KOBAYASHI YOSHIKI
分类号 H01L21/66;G01R1/06 主分类号 H01L21/66
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