| 摘要 |
PROBLEM TO BE SOLVED: To improve a pressure detection precision of pressure detectors, while simplifying their manufacture. SOLUTION: A sensor part 3 of a pressure detector 1 is provided with a ceramic substrate 15, having a recess 7 formed by stamping a contour part prior to sintering, a first electrode 9 for pressure detection arranged at the bottom surface 7c of the recess 7 on the substrate 15, a diaphragm 2 provided with a second electrode 8 for pressure detection facing the first electrode 9 for pressure detection at the bottom surface 7c of the recess 7 (a gap 37), and a chamfered part 7a, formed by chamfering the corners of the recess 7 where its bottom surface 7c and its side surfaces 7b intersect with one another. COPYRIGHT: (C)2007,JPO&INPIT
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