发明名称 |
METHOD AND APPARATUS FOR DETERMINING A RELATIVE POSITION OF A PROCESSING HEAD WITH RESPECT TO A SUBSTRATE WITH A STRUCTURE |
摘要 |
A method and apparatus wherein a substrate is provided with a Preformatted structure, with structural elements arranged in a matrix, wherein the matrix extends in an X-direction and Y-direction, wherein a processing head is provided, wherein a camera is provided which is connected with the processing head and which comprises at least one series of sensors arranged along a main line, wherein the camera scans the substrate and thereby provides at least one one-dimensional camera signal, wherein, for real-time determining at least the X-position and the Y-position of the structure with respect to the camera, the said main line includes an angle with the X-direction and with the Y-direction, wherein the angle is chosen such that the camera signal contains spatially separated X-position information and Y-position information and that the X-position information and the Y-position information can be separated from the sensor signal with the aid of signal processing. |
申请公布号 |
WO2007037683(A3) |
申请公布日期 |
2007.06.28 |
申请号 |
WO2006NL00487 |
申请日期 |
2006.09.29 |
申请人 |
OTB GROUP B.V.;DU PAU, CORNELIS PETRUS;BRIER, PETER;DINGS, FRANCISCUS CORNELIUS |
发明人 |
DU PAU, CORNELIS PETRUS;BRIER, PETER;DINGS, FRANCISCUS CORNELIUS |
分类号 |
G05B19/401;B41J11/46;H01L51/40 |
主分类号 |
G05B19/401 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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