SEMICONDUCTOR DEVICE INSPECT APPARATUS INCLUDING TEST BOARD AND POGO PIN

摘要

A method for examining a semiconductor device having a test board and a pogo pin is provided to prevent damage of the pogo pin by moving up and down and rotating the pogo pin with a female screw unit and a male screw unit formed in the pogo pin when the pogo pin and the test board are contacted to each other. A test board includes a pogo pin(300) and a pogo pin contact pad(100) contacted to the pogo pin. The pogo pin includes a plunger(400) whose end contacted to the pogo pin contact pad is convexly rounded. The pogo pin contact pad includes a concavely rounded contact pad contacting unit(200) so that it is contacted by corresponding to an end of the plunger. The pogo pin includes a cylindrical barrel(500), the plunger, a contact tip(700), and a spring(600). The contact tip is formed at the other end of the barrel opposite to the plunger. The spring is located between the plunger and the contact tip in the barrel.