| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polisher, reducing the time required for replacing a pad plate. <P>SOLUTION: In this polisher, a pad plate 33 for replacement is held on a plate holding mechanism 50 in the standby position, a polishing head 20 where the pad plate 33 is removed from a carrier member 24 is moved to the replacement position, and the pad plate for replacement held on the plate holding mechanism 50 is moved from the standby position to an upper position, whereby the pad plate 33 for replacement is engaged with an engagement hole part 32 of the carrier member 24 and mounted and held on the carrier member 24. <P>COPYRIGHT: (C)2007,JPO&INPIT |
