| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect mirror surface reflected X rays by attenuating a part of the intensity of X rays measured on the surface of a detector in a reflected X-ray small angle scattering device for measuring scattered X rays. SOLUTION: In the reflected X-ray small angle scattering device for irradiating the sample 5 on a substrate with X rays at a fine angle and measuring X rays scattered from the sample using a two-dimensional detector 6, an attenuation mechanism 7 for attenuating a part of the intensity of X rays measured on the surface of the detector 6. The sample is the thin film formed on the sample and the scattered X rays attenuated by the attenuation mechanism 7 are mirror surface reflected X rays. COPYRIGHT: (C)2007,JPO&INPIT
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