发明名称 Method for Manufacturing Mask and CMOS Image Sensor
摘要 A mask for forming a microlens pattern and a CMOS image sensor manufactured using the mask for forming a microlens pattern is provided. The mask includes a transparent substrate, a plurality of light-blocking layers, and a dummy pattern. The plurality of light-blocking layers are formed on the transparent substrate to define microlens regions of an image sensor, and the dummy pattern is formed between the plurality of light-blocking layers. The dummy pattern can be formed between corners of four adjacent light-blocking layers.
申请公布号 US2007145238(A1) 申请公布日期 2007.06.28
申请号 US20060611186 申请日期 2006.12.15
申请人 SHIM YEON AH;KIM KEE HO 发明人 SHIM YEON AH;KIM KEE HO
分类号 H01L27/00 主分类号 H01L27/00
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