| 摘要 |
A concave/convex pattern forming method which is capable of forming a concave/convex pattern on a substrate with high accuracy without causing deformation or faulty transfer of the concave/convex pattern. A concave/convex pattern is formed on an preform by pressing a stamper having a stamper-side concave/convex pattern formed thereon against a resin layer on the preform, thereby transferring the stamper-side concave/convex pattern to the resin layer. The resin layer is formed by coating the preform with a mixed resin material which is prepared by mixing a first resin material having a glass transition is temperature lower than a temperature of the resin layer during pressing of the stamper against the resin layer, and a second resin material having a glass transition temperature higher than the temperature of the resin layer during the pressing of the stamper against the resin layer.
|
