| 发明名称 |
LIQUID PRODUCING APPARATUS, LIQUID IMMERSION EXPOSURE APPARATUS, AND METHOD FOR MANUFACTURING DEVICE |
| 摘要 |
<p>Disclosed is a liquid producing apparatus (16) which comprises measuring devices (61K and the like) for measuring the state of a liquid (LQ) to be supplied into an exposure apparatus (EX). The liquid producing apparatus (16) outputs the measured results obtained by the measuring devices (61K and the like) to the exposure apparatus (EX).</p> |
| 申请公布号 |
WO2007072818(A1) |
申请公布日期 |
2007.06.28 |
| 申请号 |
WO2006JP325272 |
申请日期 |
2006.12.19 |
| 申请人 |
NIKON CORPORATION;KIDA, YOSHIKI;SHIRAISHI, KENICHI |
发明人 |
KIDA, YOSHIKI;SHIRAISHI, KENICHI |
| 分类号 |
H01L21/027;G03F7/20 |
主分类号 |
H01L21/027 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
