| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a valve drive device capable of stabilizing sealing performance under a condition where a valve element is closed and improving reliability relating to closing performance of the valve element, a method for controlling the valve drive device, and a pump. <P>SOLUTION: The valve drive device 10 is provided with an energizing member (spring 4) blocking an opening part 20 by making a diaphragm valve 5 (a bead 5d thereof) formed out of elastic body having rubber elasticity abut on a circumference (a case 9) of the opening part 20 under an energized condition. A lead screw 2 and a valve retention member 3 are engaged to convert rotation of the lead screw 2 to linear motion, and the lead screw 2 and the valve retention member 3 are disengaged to block the opening part 20 by the diaphragm valve 5. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
