| 摘要 |
PROBLEM TO BE SOLVED: To enhance a dynamic measuring range for executing measurement using a plane mirror interferometer, without requiring a large optical element and a short separate distance, in an interferometer system. SOLUTION: This interferometer is provided with the first measuring channel for providing the first signal for indicating a measured value based on an optical path 156 including the first component along the first direction to a measured object 120 and the second component along the second direction perpendicular to the first direction, the second measuring channel for providing the second signal for indicating a measured value having at least one component along the second direction, and a processing system for finding a measured value along the first direction, using the measured value of the first signal and the measured value of the second signal. COPYRIGHT: (C)2007,JPO&INPIT
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