发明名称 PHYSICAL PROPERTY ANALYTICAL METHOD, AND PHYSICAL PROPERTY ANALYTICAL SYSTEM USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a physical property analytical method capable of measuring easily the physical property of an inspected object, and a physical property analytical system using the analytical method. SOLUTION: This physical property analytical method is constituted of a measuring step (step S1) for measuring a magnetic flux density B of a leaked magnetic flux from the inspected object 10, an analytical step (steps S2-S6) for setting a predicted physical property of the inspected object 10, and for analyzing a magnetic field in an area including the inspected object 10, using the physical property, to find the magnetic flux density, and a determination step (step S7) for making the predicted physical property serve as the physical property of the inspected object 10, when the measured magnetic flux density B and the analyzed magnetic flux density B are within a prescribed relative error range, and the analytical method is mounted on the physical property analytical system 1 constituted of a measuring instrument 20 and an analyzer 30. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007163372(A) 申请公布日期 2007.06.28
申请号 JP20050362062 申请日期 2005.12.15
申请人 NIKON CORP 发明人 KAGEYAMA MOTOHIDE
分类号 G01N27/72;G01R27/02;G01R33/12 主分类号 G01N27/72
代理机构 代理人
主权项
地址