HEAT TREATMENT SYSTEM AND METHOD FOR COOLING LOADING CHAMBER THEREIN,申请号KR20070007838-传众专利搜索

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发明名称	HEAT TREATMENT SYSTEM AND METHOD FOR COOLING LOADING CHAMBER THEREIN
摘要
申请公布号	KR100733169(B1)	申请公布日期	2007.06.28
申请号	KR20070007838	申请日期	2007.01.25
申请人		发明人
分类号	H01L21/324	主分类号	H01L21/324
代理机构		代理人
主权项
地址

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