| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a mask blank by which processing steps such as an inspection step can be efficiently carried out and the process can be carried out while reliably preventing chipping or the like in a light transmitting substrate, and to provide a processing apparatus and a cart. <P>SOLUTION: In manufacturing the mask blank, a cart 20 mounting a large heavy work piece 10 comprising a light-transmitting substrate or an intermediate product of a mask blank is raised from a floor F by elevating plates 51, 52 of an inspection device 3 and linked to a vibration-free platform 40. Upon inspection, it is not required to move the work piece 10 between the cart 20 and the vibration-free platform 40. <P>COPYRIGHT: (C)2007,JPO&INPIT |
