X-RAY MASK AND ITS MANUFACTURING METHOD, AND GRADATION MASK FOR ULTRAVIOLET RAY LITHOGRAPHY

摘要

PROBLEM TO BE SOLVED: To provide a mask which enables molding of three-dimensional shape in microfabrication by an LIGA process and ultraviolet ray lithography, using a simple and convienient method.

SOLUTION: A binder resin containing particulate as an X-ray absorber 10 on a supporting body penetrating X ray is pattern-printed and laminated as an ink agent of a particulate paste 17 on a substrate 11 by ink jet method. The lamination thickness is changed to form an X-ray mask 12 with three-dimensional structure wherein the penetration quantity of X ray can be controlled.

COPYRIGHT: (C)2007,JPO&INPIT