| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a pattern-forming object which can obtain a pattern-forming object such as a substrate with a micro-lens or the like by a simple method compared with a conventional one. SOLUTION: The manufacturing method of pattern-forming object uses the substrate, and an imprinted substrate equipped with photosensitive resin layer formed on the substrate, and furthermore a template having uneven pattern on a front surface. The method comprises an adhesion lamination forming process of forming an adhesion lamination, by making the photosensitive resin layer of the imprinted substrate and the uneven pattern of the template stick firmly; an exposure process of irradiating with light from a template side of the adhesion lamination; and a development process of developing the uneven imprinted substrate with a developer, by forming the uneven imprinted substrate by lifting the template of the adhesion lamination after the exposure process. COPYRIGHT: (C)2007,JPO&INPIT
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