Method of making a multilayered device with ultra-thin freestanding metallic membranes using a peel off process

摘要

A micro electromechanical device includes a substrate having stacked films. Each of the films includes a first layer and a second layer. The second layer is metal of a predetermined thickness. The stacked films are formed by electroplating the second layer on the first layer and lifting off a third layer, a fourth layer and a fifth layer.