COATING LIQUID FOR FORMING LOW DIELECTRIC CONSTANT AMORPHOUS SILICA COATING FILM AND LOW DIELECTRIC CONSTANT AMORPHOUS SILICA COATING FILM OBTAINED FROM SUCH COATING LIQUID

摘要

Disclosed is a coating liquid for forming a low dielectric constant amorphous silica coating film having a relative dielectric constant of not more than 3.0 and a film strength (Young's modulus of elasticity) of not less than 3.0 GPa, while exhibiting excellent hydrophobicity. Specifically disclosed is a coating liquid for forming a low dielectric constant amorphous silica coating film, which comprises (1) a silicon compound obtained by hydrolyzing a bis(trialkoxysilyl)alkane (BTASA) and an alkoxysilane (AS) in the presence of a tetraalkylammonium hydroxide (TAAOH), or (2) a silicon compound obtained by hydrolyzing a bis(trialkoxysilyl)alkane (BTASA), an alkoxysilane (AS) and a tetraalkylorthosilicate (TAOS) in the presence of a tetraalkylammonium hydroxide (TAAOH).