| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin-film laminated substrate and the like that can suppress a conductive layer from having a step cutoff electrically causing short circuiting, the conductive layer that covers a step difference region of an insulating layer and the upper layer of the periphery of the step difference region. SOLUTION: The thin-film laminated substrate according to one embodiment is a thin-film laminated substrate, having on it an insulating layer with a step difference structure and a conductive layer formed on the insulating layer and covering at least the step difference structure, wherein the level difference structure has a forward-tapered shape, formed such that the width of the step difference region's bottom becomes progressively narrower with the increase in the distance from the substrate, and at least one kind of impurity is doped in the step difference structure of at least the insulating layer. COPYRIGHT: (C)2007,JPO&INPIT
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