发明名称 |
Method and apparatus for simultaneous high-speed acquisition of multiple images |
摘要 |
A method and apparatus for simultaneous high-speed inspection and acquisition of multiple data channels is provided. The method and apparatus enables inspecting semiconductor wafers and reticles and comprises converting a single image region into two image sections, reorienting one image into a transposed configuration enabling simultaneous scanning of two inspected object locations with a single sensor, and controlling acquisition parameters for a second image by using information collected from a first image in a feedback arrangement. The design provides a dual-linear or time-delay-integration sensor operating in a split readout configuration mode to simultaneously provide data from two regions of the sensor using two sets of readout circuitry.
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申请公布号 |
US2007146693(A1) |
申请公布日期 |
2007.06.28 |
申请号 |
US20050318715 |
申请日期 |
2005.12.27 |
申请人 |
BROWN DAVID L;CHUANG YUNG-HO |
发明人 |
BROWN DAVID L.;CHUANG YUNG-HO |
分类号 |
G01N21/88 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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