发明名称 Apparatus and method for detecting error of transfer system
摘要 An apparatus is disclosed for detecting error in a transfer system for transferring a substrate loaded upon fabricating of a liquid crystal display device of a flat panel display device. In an apparatus for detecting error of the transfer system, a test substrate includes reflective marks arranged symmetrically on both sides. An emitter generates light to radiate onto the transferring test substrate. A receiver receives light reflected from the reflective marks of the test substrate. A controller detects any error of the transfer system on the basis of the reflective times received by the receiver. A display displays any errors in the transfer system detected by the controller.
申请公布号 US2007146690(A1) 申请公布日期 2007.06.28
申请号 US20060449232 申请日期 2006.06.08
申请人 发明人 KIM SANG GYU
分类号 G01N21/88 主分类号 G01N21/88
代理机构 代理人
主权项
地址