发明名称 Nano-array and fabrication method thereof
摘要 The invention provides a method for fabricating a nano-array comprising the following steps. A template with a plurality of nano-holes is provided. A polymer is embossed by the template to integrally form a plurality of nano-protrusions thereon, and demolding to reveal the nano-protrusions. The nano-protrusion has a concave or convex top surface.
申请公布号 US2007148815(A1) 申请公布日期 2007.06.28
申请号 US20060509660 申请日期 2006.08.25
申请人 INDUSTRIAL TECHNOLOGY RESEARCH INSTITUE 发明人 CHAO CHIH-CHIANG;SHIAO PO-LING;LAI MEI-CHUN
分类号 H01L21/16 主分类号 H01L21/16
代理机构 代理人
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