发明名称 |
Nano-array and fabrication method thereof |
摘要 |
The invention provides a method for fabricating a nano-array comprising the following steps. A template with a plurality of nano-holes is provided. A polymer is embossed by the template to integrally form a plurality of nano-protrusions thereon, and demolding to reveal the nano-protrusions. The nano-protrusion has a concave or convex top surface.
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申请公布号 |
US2007148815(A1) |
申请公布日期 |
2007.06.28 |
申请号 |
US20060509660 |
申请日期 |
2006.08.25 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUE |
发明人 |
CHAO CHIH-CHIANG;SHIAO PO-LING;LAI MEI-CHUN |
分类号 |
H01L21/16 |
主分类号 |
H01L21/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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