| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a droplet discharge device in which alignment accuracy between a striking position of a droplet and an irradiation position of a laser beam is improved and a shape controlling property of a pattern is improved. <P>SOLUTION: The droplet discharge device has an alignment mechanism 40 provided with: a light conversion film 43 laminated on the upper surface of a transmission substrate 42; and a light receiving part 45 arranged on the lower side of the transmission substrate 42. Therein, both of the droplet Fb from a discharge head 33 and the laser beam B of an infrared region are received on the surface (detection surface) of the light conversion film 43. Further, an intensity distribution of composite light of external light via the droplet Fb struck on the detection surface and conversion light of the the laser beam B with which the detection surface is irradiated is detected from the side facing the discharge head 33. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
