摘要 |
A magnetic sensing element using a Heusler alloy comprises at least one pinned magnetic layer in which the magnetization is pinned in one direction, a free magnetic layer and at least one nonmagnetic layer disposed between the at least one pinned magnetic layer and the free magnetic layer in which at least one of the free and pinned magnetic layers comprise a Heusler alloy layer disposed on a fcc layer in which equivalent crystal planes represented as 111 planes are preferentially oriented in the direction parallel to the surface layer and wherein a columnar crystal is formed, in which a crystal grain boundary formed in the fcc layer, the crystal grain boundary appearing in a cut surface in the direction parallel to the thickness of the fcc layer, and a crystal grain boundary formed in the Heusler alloy layer are continuous. |