发明名称 Reticle-carrying container
摘要 <p>The present invention supports a reticle (12) in a safe and secure manner. A reticle-carrying container (11) includes a pod (13) for storing the reticle (12), a door (14) and a seal (15) for blocking and sealing hermetically the pod (13). A pair of reticle retainers (25,45) is provided on the insides of the pod (13) and door (14). Each of the reticle retainers (25,45) includes an inclined plane (28) that contacts an upper corner (12A) or a lower corner (12B) of peripheral edge of the reticle (12) and supports the reticle (12) elastically. The inside of the inclined plane (28) is provided with concave portions (31,52) that enables a shock-absorbing function of allowing the deformation of the inclined plane (28), and supporting the reticle elastically, at the time of contact with the upper corner (12A) or the lower corner (12B) of peripheral edge of the reticle (12).</p>
申请公布号 EP1662324(A3) 申请公布日期 2007.06.27
申请号 EP20050024325 申请日期 2005.11.08
申请人 MIRAIAL CO., LTD. 发明人 MATSUTORI, CHIAKI;YANAGIHARA, KOICHI
分类号 G03F7/20;B65D25/10;B65D25/20;B65D85/86;G03F1/66;H01L21/027;H01L21/673 主分类号 G03F7/20
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