| 摘要 |
An apparatus and method for aging an electroluminesence device is provided to prevent damage of a substrate at arranging and aligning processes by installing a substrate pressing part which is movable by pressure. A substrate(60) having an electroluminescence device is fixed to a substrate support(42). Plural probe jigs(46) have proves(44) applying an inspection signal to the electroluminescence device on the substrate. A transfer unit(48) fixes or transfers the probe jig towards the substrate support. Substrate pressing parts(50) protrude from the probe jig towards the substrate support. The substrate pressing part is higher than the probe. |
