| 摘要 |
A vacuum chamber for an LCD(Liquid Crystal Display) is provided to separately mount a lamp heater in a chamber, thereby significantly reducing the outgassing time. A pump(50) discharges the inside of a vacuum chamber(10). Outgassing lamp heaters(100) are arranged within the vacuum chamber. The lamp heaters are arrayed at the inner wall of the chamber with the same distance. The lamp heaters are arranged at different positions at the opposite sidewalls of the chamber. The lamp heaters and the pump are connected with a controller located at the outside of the chamber and controlled simultaneously. The vacuum chamber is used to any one among a physical deposition apparatus, a chemical vapor deposition apparatus and an etching apparatus. |
