| 摘要 |
An acceleration sensor (1) has a foundation (2) having an XY base plate surface in parallel to an XY plane; a frame-like beam (4) placed so as to float above the XY base plate of the foundation (2); a beam support/fixation section for supporting the beam (4) at the foundation, in the form of a double end-supported beam (2), via support sections (5a, 5b); a weight section (7 (7a, 7b)) provided so as to float above the XY base plate surface of the foundation (2); and a connection section (8) for supporting the weight section (7(7a, 7b)) at the beam (4) in a cantilever manner. The weight section (7) is adapted to be displaceable in three axis directions of the X-axis, Y-axis, and Z-axis by bending deformation of the frame-like beam (4). On the beam (4) are arranged a section for detecting acceleration in the X-axis direction based on bending deformation of the beam (4) caused by displacement of the weight section (7) produced by acceleration in the X-axis direction; a section for detecting acceleration in the Y-axis direction based on bending deformation of the beam (4) caused by displacement of the weight section (7) produced by acceleration in the Y-axis direction; and a section for detecting acceleration in the Z-axis direction based on bending deformation of the beam (4) caused by displacement of the weight section (7) produced by acceleration in the Z-axis direction. |
