METHOD OF PRODUCING A SUBSTRATE COMPRISING A POLARIZATION DOMAIN REVERSAL STRUCTURE AND SUBSTRATE COMPRISING SUCH A POLARIZATION DOMAIN REVERSAL STRUCTURE

摘要

When a domain inversion part is produced by means of electric field polling process, damage in the vicinity of the forward end of a comb electrode and deviation of width of each domain inversion part are to be reduced. A polarization domain inversion structure has polarization domain inversion parts is produced by electric field poling process using a comb electrode formed on one surface of a substrate of a ferroelectric single crystal and of a single domain, and the comb electrode has a plurality of electrode portions and feeding portion. Each of the electrode portions 5 corresponds with each domain inversion part of the domain inversion structure. The electrode portion 5 has a plurality of low resistance pieces 12a to 12e, 13a to 13e, 14a to 14e, 15a to 15e and 16a to 16e arranged in a direction "F" intersecting the longitudinal direction "E" of the electrode portion 5 and spaced apart with each other.