| 摘要 |
<p>According to the invention, a shape with rotational symmetry and minuteness can be easily processed. There is provided a laser ablation apparatus that irradiates laser beams on a work-piece to process the work-piece. The laser ablation apparatus includes a work-piece supporting part 30 that supports the work-piece, an irradiating part that is arranged opposite the work-piece supporting part and irradiates the laser beams of which at least a part are transmitted through a mask 50 on the work-piece, and a rotary driving part 80 that drives the work-piece supporting part and the irradiating part in order to relatively move these parts in a direction of rotation.</p> |
