METHOD AND APPARATUS FOR SCRIBING BRITTLE MATERIAL BOARD AND SYSTEM FOR BREAKING BRITTLE MATERIAL BOARD

摘要

During scribing processes of a brittle material substrate, the present invention prevents the generation of an unnecessary crack deriving in an unspecified and uncontrollable direction.

The mother glass substrate 90 is suction-chucked onto the first securing table 21 and the second securing table 22 via suction by a vacuum pump and that alike from suction holes set up on the surfaces of the first securing table 21 and the second securing table 21. Unequal internal stresses existing at this time within the inner section of the mother glass substrate 90 become erased once, by means of moving the first securing table 21 and/or the second securing table 21 for a micro distance along a predetermined direction. After adjusting the stresses towards a specific direction, scribing is to be conduct.