发明名称 METHOD FOR FABRICATION OF THIN FILM CAPACITOR
摘要 Thin film capacitors including a dielectric layer obtained by anodizing a layer obtained by sputtering a film-forming metal in a nitrogen or carbon containing ambient at partial pressures ranging from 10<->3 to 10<->5 torr. manifest marked improvement with regard to initial leakage and life test failure as compared with conventional prior art capacitors.
申请公布号 US3664931(A) 申请公布日期 1972.05.23
申请号 USD3664931 申请日期 1970.07.27
申请人 DIETER GERSTENBERG 发明人 DIETER GERSTENBERG
分类号 C23C14/00;(IPC1-7):C23F17/00;C23B9/00;C23C15/00 主分类号 C23C14/00
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