发明名称 |
CMOS IMAGE SENSOR, AND METHOD FOR FABRICATING THE SAME |
摘要 |
A CMOS image sensor is provided to improve optical sensing efficiency of a CMOS image sensor by removing refraction and reflection defects of incident light caused by a multilayered structure while using an air gap region. A substrate(301) having a photodiode(303) is prepared. An air gap region is formed on the photodiode wherein the width of the air gap region doesn't exceed the width of the photodiode region to increase a light condensing ratio. A barrier layer is formed on the wall and bottom of the air gap region. A passivation layer is formed on the air gap region. An insulation layer can be formed on the sidewall of the barrier layer.
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申请公布号 |
KR20070066112(A) |
申请公布日期 |
2007.06.27 |
申请号 |
KR20050126902 |
申请日期 |
2005.12.21 |
申请人 |
MAGNACHIP SEMICONDUCTOR, LTD. |
发明人 |
LEE, JOON HYEON;CHOI, KYEONG KEUN |
分类号 |
H01L27/146 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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