发明名称 CMOS IMAGE SENSOR, AND METHOD FOR FABRICATING THE SAME
摘要 A CMOS image sensor is provided to improve optical sensing efficiency of a CMOS image sensor by removing refraction and reflection defects of incident light caused by a multilayered structure while using an air gap region. A substrate(301) having a photodiode(303) is prepared. An air gap region is formed on the photodiode wherein the width of the air gap region doesn't exceed the width of the photodiode region to increase a light condensing ratio. A barrier layer is formed on the wall and bottom of the air gap region. A passivation layer is formed on the air gap region. An insulation layer can be formed on the sidewall of the barrier layer.
申请公布号 KR20070066112(A) 申请公布日期 2007.06.27
申请号 KR20050126902 申请日期 2005.12.21
申请人 MAGNACHIP SEMICONDUCTOR, LTD. 发明人 LEE, JOON HYEON;CHOI, KYEONG KEUN
分类号 H01L27/146 主分类号 H01L27/146
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