PRESSURIZER

摘要

Disclosed is a high-accuracy pressure device for working that has a large pressing force and requires small driving energy. The pressure device comprises: a base plate, a support plate spaced at a prescribed distance from the base plate, a first slider and a second slider; the first slider and the second slider being formed so that the two can move between the base plate and the support plate in a direction orthogonal to the base plate and support plate and are capable of relative movement with each other in that direction, a position sensor for detecting the moving position of the second slider; a first drive means for driving the first slider; a second drive means for driving the second slider; and a central processing unit which controls the first drive means and second drive means and receives and processes position signals from the position sensor.