Semiconductor force sensor

摘要

A semiconductor force sensor capable of preventing a diaphragm part ( 37 ) from being broken and accurately measuring a force applied thereto in a direction orthogonal to the diaphragm part ( 37 ), wherein a force transmitting means for applying a measured force to the diaphragm part ( 37 ) of a semiconductor force sensor element ( 31 ) is formed of a sphere ( 33 ) having a rigidity, and a through hole ( 63 ) passing through an opposed wall part ( 55 ) toward the diaphragm ( 37 ) is formed in the opposed wall parts ( 55 ) at a position opposed to the center part of the diaphragm part ( 37 ) so that a part of the sphere ( 33 ) can face the outside of the opposed wall part ( 55 ) and stores a part of the remaining part of the sphere ( 33 ) to allow the sphere ( 33 ) to be moved only in a direction orthogonal to the diaphragm part ( 37 ) and rotated on the center part of the diaphragm part ( 37 ).