发明名称 Integrated circuit devices, edge seals therefor
摘要 An edge seal for a chip with integrated circuits. A first metal line extends along a periphery of the chip, with a first inter-metal dielectric layer on the first metal line. A second metal line overlies the first inter-metal dielectric layer and extends along the periphery of the chip. A plurality of first metal plugs in the first inter-metal dielectric layer connects the first metal line and the second metal line and at least one first metal wall in the first inter-metal dielectric layer is laterally adjacent to a periphery of the first metal line.
申请公布号 US7235864(B2) 申请公布日期 2007.06.26
申请号 US20040002098 申请日期 2004.12.03
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 LEE TZE-LIANG
分类号 H01L23/544;H01L21/78;H01L23/04;H01L23/58 主分类号 H01L23/544
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