ARTICLE, METHOD, AND APPARATUS FOR ELECTROCHEMICAL FABRICATION

摘要

An electroplating method that includes: a) contacting a first substrate (2) with a first electroplating article (4), which includes a support and a conformable mask disposed in a pattern on the support; b) electroplating a first metal from an electroplating bath (58) which is a source of metal ions onto the first substrate in a first pattern, the first pattern corresponding to the complement of the conformable mask pattern; and c) removing the first article from the first substrate, is disclosed. The method may be used in the microfabrication of miniaturized devices. Electroplating articles and electroplating apparatus a re also disclosed.