APPARATUS FOR MANUFACTURING OF BASED THIN FILM SOLAR CELL

摘要

An apparatus for manufacturing of a CIS(CuInSe2) based thin film for a solar cell is provided to improve temperature measurement sensitivity by using a substrate temperature measurement thermoelement contacted directly to a substrate. A vacuum chamber is provided with vaporization sources. A heating unit is received in the vacuum chamber and provided with a substrate temperature measurement thermoelement(22) and a heat source temperature measurement thermoelement(23). The substrate temperature measurement thermoelement is directly contacted to a heat source and a substrate to detect temperature of the substrate, and the heat source temperature measurement thermoelement detects temperature of the heat source. A rotational unit is connected to the heating unit to rotate it through a motor driving, and provided with a hollow and a rotational tube protruded to the outside of the vacuum chamber. A controller controls the heating unit and the rotational unit.