POLYGON MIRROR AND WORKING METHODE OF THE SAME

摘要

A polygon mirror and a processing method thereof are provided to extend a beam scanning range of the polygon mirror and to cut down the manufacturing cost by mass-producing the polygon mirrors through an ultra precision processing method using aluminum materials. A polygon mirror processing method is composed of a material processing step for forming a through-hole(12) in the center of processing materials of a polygon mirror(10); a material fixing step for clamping the processing material to an angle splitting shaft through the through-hole formed on the processing material; a reference mirror surface processing step for forming a reference mirror surface(13) parallel to or inclined at the predetermined angle for the angle splitting shaft, on the outer peripheral surface of the processing material of the polygon mirror, by using a fly-cutter installed at a main shaft capable of being controlled in the directions of three axes; a material rotating step for rotating the processing material of the polygon mirror for the reference mirror surface at the predetermined angle; and a mirror surface processing step for processing the mirror surface parallel or inclined to the angle splitting shaft, on the outer peripheral surface of the processing material of the turned polygon mirror.