| 摘要 |
A jig device which can perform uniform deposition by aiding stable mounting of deposition objects such as tools during the vacuum deposition process, enables large quantities of the deposition objects to be deposited, and seeks process stabilization through uniform distribution of bias voltage, and a deposition system comprising the jig device are provided. A jig device(300) comprises: a plurality of cups(301) which contain a plurality of deposition objects(S) to be deposited, and each of which has a clamping projection(302) formed at one end thereof; a lower supporting plate(305) in which clamping holes(304) are formed such that respective clamping projections of the plurality of cups are clamped to the clamping holes to fix and support the plurality of cups; an upper supporting plate(309) in which fixing holes(308) are formed to fix the plurality of cups in a state that the upper supporting plate is spaced apart from the lower supporting plate in a predetermined distance; and a shaft(307) that passes through the lower supporting plate to rotatably support the lower supporting plate. The jig device further comprises clamping members(303) for maintaining the distance between the upper supporting plate and the lower supporting plate.
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