METHOD FOR MANUFACTURING POLYMER OPTICAL WAVEGUIDE DEVICE

摘要

A method of manufacturing an optical waveguide device comprises the steps of providing a V-groove in a substrate; applying a coating liquid for embedded polymer having an NV of 35% or higher to the substrate and drying the coating liquid, and removing the unnecessary part of the embedded polymer in such a way that the embedded polymer remains only in the V-groove; forming a polymer optical waveguide on the substrate; making a cut in the end face of the optical waveguide; and removing all the polymer in and over the V-groove. In manufacturing such an optical waveguide device, this method prevents the core center of the obtained optical waveguide from being lower than designed because of the flow of a polymer coating liquid for the core and the clad layer down into the opening of an adjacent V-groove. This enables the manufacturing of an optical waveguide device with no deviation of the core center.