摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric ceramics which shows a large amount of displacement and is superior in the temperature dependency of a dielectric constant, a laminated piezoelectric ceramic element, and a manufacturing method for the laminated piezoelectric ceramic element. <P>SOLUTION: The piezoelectric ceramics is made of a lead zircorate titarate composition, shows a tetoragonal crystal shape at a temperature of 25°C, and has a phase transfer temperature in transformation from a tetoragonal form to a cubic form of 250°C or higher. When in the tetragonal form, the piezoelectric ceramics has a lattice constant ratio c/a of 1.017 to 1.023, and the half-width of an X-rays diffraction strength at (101) surface of 0.1° to 0.3°. The laminated piezoelectric ceramic element 1 is made by alternately laminating piezoelectric ceramic layers 11 composed of the above piezoelectric ceramics and inner electrode layers 12 and 13, and the manufacturing method is provided for the laminated piezoelectric ceramic element 1. In manufacturing the laminated piezoelectric ceramic element 1, a sintering process is carried out at a sintering temperature T(°C) that satisfies the inequality: T<SB>min</SB>+50≤T≤T<SB>min</SB>+250, where the lowest temperature T<SB>min</SB>(°C) for sintering the piezoelectric ceramic layer 11 at a relative density of 95% or higher. <P>COPYRIGHT: (C)2007,JPO&INPIT |