| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide the through-hole forming method of a ferrite plate, for forming a small diameter through-hole with a large aspect ratio, surely removing dross in a short period of time, and also reducing manufacturing cost. <P>SOLUTION: In this through-hole forming method: a ferrite plate 1 is fixed to a positioning tool 5; the original point of the X axis and Y axis is determined from the position of a reference through-hole 4 bored in the positioning tool 5; and the position of the through-hole 10 that is to be formed on the ferrite plate 1 is determined. Then, the ferrite plate 1 is irradiated with a CO<SB>2</SB>laser beam 9 via a lens 7 and a high-speed galvano mirror 8 to form the through hole 10 on the ferrite plate 1. Subsequently, dross 21 formed around the through-hole 10 is removed by sand blast 11. By performing cycle machining in which the CO<SB>2</SB>laser beam 9 is emitted a plurality of times, the through-hole with a small diameter and high accuracy can be efficiently formed. In addition, by removing the dross 21, joining reliability can be enhanced between an electrically conductive film of a coil or the like to be formed thereafter and the ferrite plate 1. Further, since a photo-lithography process is dispensed with, the manufacturing cost can be reduced. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
