摘要 |
PROBLEM TO BE SOLVED: To correct the characteristics of an electric element having nano wires. SOLUTION: One or more nano wires among a plurality of nano wires are cut so that the characteristic value of an electric element can be turned to be a requested value. In desired configurations, the electric element is provided with a source electrode 2, a drain electrode 3, and a gate electrode 4 on a substrate 5; and a plurality of nano wires 1 are used as conductive channels between the source electrode 2 and the drain electrode 3, so that TFT elements can be configured. The characteristics of the TFT elements are measured, and one or more nano wires 1 are cut by using a laser trimming so that the measured characteristic values can be turned to be a desired value. COPYRIGHT: (C)2007,JPO&INPIT
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