发明名称 ION SOURCE FOR QUADRUPOLE MASS SPECTROMETER
摘要 PROBLEM TO BE SOLVED: To provide an ion source for a quadrupole mass spectrometer wherein ion generation efficiency is improved to improve sensitivity of the quadrupole mass spectrometer. SOLUTION: In this ion source for the quadrupole mass spectrometer provided with an ion source, a mass separation part and an ion detector and constituted for injecting ions generated by the ion source into the mass separation part, separating them by a ratio of mass and charge, and detecting the target ion by an ion detector, an ionization chamber auxiliary electrode optimizing potential distribution in an ionization chamber is provided between the ionization chamber and an ion extraction electrode contained in the ion source. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007157529(A) 申请公布日期 2007.06.21
申请号 JP20050352073 申请日期 2005.12.06
申请人 ULVAC JAPAN LTD 发明人 MATSUMOTO YOSHIKAZU;TAKAHASHI NAOKI
分类号 H01J49/10;G01N27/62;H01J49/14;H01J49/42 主分类号 H01J49/10
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