Device for handling fluids with a channelled substrate has measuring substrate with integrated heater and temperature sensor both in thermal contact with channel and connected electrically to superposed system

摘要

The device has a substrate (10) with at least one fluid channel (12) and a measuring substrate (11) on which a thermal flow sensor (15, 16) is mounted. The measuring substrate has an integrated heater (15) and a temperature sensor (16) which are both in thermal contact with the channel. The measuring substrate has a membrane (17) over an opening or indentation (18) and the sensor and heater are placed at least partially on the membrane. Contacts (20) on the measuring substrate have connecting wires (21) for electrically connecting the measuring substrate to a superposed system.