ALIGNER AND ALIGNING METHOD

摘要

An aligner and an aligning method by which the cost of a photomask can be reduced and the time required for aligning the photomask can be shortened. On a photomask (1a), a translucent pattern (11) capable of transmitting light energy is arranged continuously along a specific direction. While moving the photomask and a substrate (3) continuously and relatively along the arranging direction of the translucent pattern (11), the photomask (1a) and the substrate (3) are irradiated with light energy every time when they are moved by a distance equal to an integer time of the arrangement pitch of the translucent pattern.