| 摘要 |
PROBLEM TO BE SOLVED: To provide a form measuring instrument capable of measuring properly a surface roughness. SOLUTION: This form measuring instrument 10 is provided with a roughness sensor 14 for outputting a measured data including cross-sectional shape information of an evaluation objective face of a work 22, a relative moving mechanism 12 for moving relatively a position of the roughness sensor 14 on the work 22, along the evaluation objective face, and for outputting a relative moving amount as index moving amount information, at a movement resolution▵θpitch, a timer sampling means 16 for sampling the measured data from the roughness sensor 14 at a constant time interval t<SB>s</SB>shorter than a time required when the relative moving mechanism 12 moves by the movement resolution▵θ, and a data processing mechanism 18 for evaluating the surface roughness of the work 22, based on the measured data at an interval fixed pitch, using the measured data at the constant time interval t<SB>s</SB>from the timer sampling means 16 as the measured data at the interval fixed pitch, based on the index moving amount information from the relative moving mechanism 12. COPYRIGHT: (C)2007,JPO&INPIT
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