| 摘要 |
PROBLEM TO BE SOLVED: To provide a multi-element simultaneous type fluorescent X-ray analyzer capable of reducing a background as to a trace analysis, without complicating constitution so much. SOLUTION: In this multi-element simultaneous type fluorescent X-ray analyzer provided with an X-ray source 4 for irradiating a sample 1 with a primary X-ray 3, and a fixed goniometer 14 having a spectral diffraction element 8 and a detector 10 to measure an intensity of a fluorescent X-ray 5 emitted from the sample 1, in every wavelength to be measured, a rotational axis 11B for defining a spectral diffraction angleθ<SB>B</SB>of the spectral diffraction element 8 is located in a position rotated by 90°around an advancing direction 12B of the spectrally dispersed fluorescent X-ray 5 as an axis, from a position in parallel to a sample surface 1a. COPYRIGHT: (C)2007,JPO&INPIT
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